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Pneumatic cylinders

Standard

  • Large bore size cylinder SCS2
  • Pencil shaped cylinder SCP*3
  • Medium bore size cylinder CMK2
  • Medium bore size cylinder CMA2
  • Round shaped cylinder SCM
  • Tie rod cylinder SCG
  • Medium bore size cylinder SCA2

With valve

  • Small cylinder with valve CKV2
  • Cylinder with valve CAV2, COVP2, COVN2

Space saving structure

  • Compact cylinder SSD2
  • Guided super compact cylinder SSG
  • Compact cylinder SSD
  • Cartridge cylinder CAT
  • Small direct mounting cylinder MDC2
  • Small cylinder with suction pad MVC
  • Compact cylinder SMG
  • Small compact cylinder MSD, MSDG
  • Flat compacted cylinder FC*
  • Stopper cylinder STK

Combined functions

  • Linear slide cylinder LCW
  • Guided cylinder STM
  • Guided cylinder STG
  • Guided cylinder STS, STL
  • Linear slide cylinder LCR
  • Linear slide cylinder LCG
  • Linear slide cylinder LCX
  • Linear slide cylinder LCM
  • Linear slide cylinder LCY
  • Twin rod cylinder STR2
  • Unit cylinder UCA2

Rodless

  • Rodless cylinder SRL3
  • High precision guided rodless cylinder SRG3
  • High precision guided rodless cylinder SRM3
  • Rodless cylinder with brake SRT3
  • Rodless cylinder with magnet MRL2
  • Rodless cylinder with magnet with high precision guide MRG2
  • Shuttle mover SM-25

Related products

  • Floating fitting FJ
  • Simplified floating fitting FK
  • Rod eye

With brake function, With position locking function

  • Brake cylinder (medium bore size) JSC3, JSC4
  • Brake cylinder ULKP, ULK
  • Brake cylinder (medium bore size) JSK2, JSM2
  • Tie rod cylinder with brake JSG
  • Position locking compact cylinder USSD
  • Free position locking flat cylinder UFCD
  • Free position locking large bore size cylinder USC
  • Brake unit JSB3
  • Linear guide lock LMB
  • Linear guide lock LML

High speed

  • High energy absorption cylinder HCM
  • High speed cylinder HCA

Special

  • Air bearing actuator LBC
  • Clamp cylinder CAC4
  • Position locking clamp cylinder UCAC2
  • Lightweight clamp cylinder CAC-N, UCAC-N
  • Rotary clamp cylinder RCC2
  • Rotary clamp cylinder RCS
  • High power cylinder SHC
  • Mechanical power cylinder MCP
  • Guideless cylinder GLC
  • Robot cylinder MFC
  • Balancer unit BBS
  • Pin clamp cylinder PCC

Oscillation, rotation drive

  • Fine speed fan rotary actuator SFR, SFRT
  • Rotary actuator RRC
  • Table rotary actuator GRC
  • Rotary actuator with vane mechanism RV3*

Modular unit

  • New handling system NSR, NHS
  • Hybrid robot HRL

Length measuring function

  • Cylinder with length measuring sensor SSD-LN
  • Hand with length measuring sensor BHA-LN, BHG-LN, BHE-LN

Hand

  • Parallel hand
  • Wide angle hand
  • Centering hand

Chuck

  • 3-way jaw bearing chuck CKG
  • Automatic hand changer CHC
  • 3-way jaw long stroke chuck CK
  • 3-way jaw thin chuck CKA
  • Hollow chuck CKF
  • Powerful chuck with high gripping power CKH2
  • Ultra long stroke chuck CKJ
  • Powerful chuck CKL2
  • 2-way powerful chuck CKLB2
  • Thin chuck CKS
  • High gripping power chuck CKT, CKU
  • Position locking powerful chuck CKL2-FC

Shock absorber

  • Shock absorber for linear slide cylinder SKL
  • Shock absorber (fixed) NCK
  • Shock absorber (adjustable) SCK
  • Shock absorber (adjustable) FCK

Cylinder switch

  • Cylinder switch with connector
  • Heat resistance E series
  • F series
  • Strong magnetic field proof H series
  • K series
  • M series
  • R series
  • Contact protecting circuit box SKAC, SKDC
  • T series
  • Small strong magnetic field proof V series

Information

  • Introduction
  • Ending

Pneumatic Valves

Pilot operated 3,4,5-port valve

  • Pressure Sensor Option Added 4GB*R
  • Metal base 4GA1 to 3R, 4GB1 to 3R
  • Metal base 4GD1 to 3R, 4GE1 to 3R
  • Block manifold MN4GAR, MN4GBR
  • Block manifold MN4GDR, MN4GER
  • Master valve 4GAR, 4GBR/M4GAR, 4GBR
  • Metal base 4GA4 / 4GB4
  • 4G Unit valve
  • Plug-in block manifold W4G2
  • Plug-in manifold W4G4
  • Pneumatic Valves metal base 4KA, 4KB
  • Pneumatic Valves, block manifold MN4KB
  • Pneumatic Valves/ master valve 4KA / 4KB
  • Pneumatic Valves 4F
  • Pneumatic Valves/ master valve 4F
  • Small pneumatic Valves 4SA0 / 4SB0
  • Pneumatic Valves 4L2-4, LMF0
  • PLC-compatible block manifold MN3E / MN4E
  • PLC-compatible reduced wiring block manifold Pneumatic Valves MN3S0 / MN4S0
  • Reduced wiring valve 4TB
  • Miniature pneumatic valve P, M, B
  • Pilot operated 5-port valve PCD

Direct acting 3-port valve

  • Block manifold MN3Q
  • Negative pressure switching unit MV3QR
  • Direct acting 3-port valve 3QRA, 3QRB, 3QB
  • Small pneumatic Valves
  • Pneumatic valve 3PA, 3PB

Large flow rate 3-port valve

  • Pilot operated solenoid valve / external pilot operated air drive poppet valve NP, NAP, NVP

Pilot operated explosion-proof 5-port valve

  • Pilot operated 5-port valve 4**0EX
  • Pneumatic valve 4F**0E

Manual 4-port valve

  • Manual selector valve

Pilot operated 5-port valve Combined functions

  • Shock absorbing valve

Pilot operated 5-port valve ISO valve

  • Pilot operated 5-port valve ISO valve PV5G, PV5, GMF, PV5S-0

Information

  • Pneumatic Valves Intro
  • Pneumatic Valves Ending

F.R.L, Sensor, Auxiliary

Filter, regulator for outdoor use

  • Air filter FW
  • Oil mist filter MW
  • Filter / regulator WW
  • Regulator RW

Electro pneumatic regulator

  • Thin electro pneumatic regulator MEVT
  • High precision electro pneumatic regulator EVR
  • Low pressure electro pneumatic regulator EVL
  • Digital electro pneumatic regulator EVD
  • Electro pneumatic regulator EV2100V
  • Compact electro pneumatic regulator EVS2
  • Electro pneumatic regulator EV0000

F.R.L Combination

  • Combination C*0*0
  • F.R.L Combination Copper and PTFE free C*000-P6
  • Compact F.R.L kit K60570
  • Shut-off valve V*0*0
  • Mechanical pressure switch P4000
  • Compact mechanical pressure switch P*100
  • Slow start valve V3301, V3321
  • Distributor D*01, D300
  • Pipe adaptor A10*, A40*, A80*
  • Bracket, Joiner B*10, B*20,B*30, C*000-J*00

Air unit

  • Clean air unit CAU30
  • Air unit CXU

Precision components

  • Glass float module GFM
  • Precise suction plate PVP
  • Magnetic spring buffer FBU2

Pressure sensors

  • Digital gap switch GPS3, MGPS3, UGPS3
  • Flow pressure monitor MD
  • Digital pressure sensor PPX
  • Mechanical pressure switch for air APE, APS
  • Cutting tool breakage detection switch TLPS, MTLPS, UTLPS
  • Air sensor PEL systems
  • Pressure switch for coolant CPD, CPE
  • Electronic differential pressure switch DP1000
  • Electronic pressure switch with digital display (pressure switch) PPD3
  • Electronic pressure switch (pressure switch) PSW
  • Compact electronic pressure switch (pressure switch) PPE
  • Electronic pressure sensor with digital display PPG
  • Contact confirmation switch (gap switch) GPS2, MGPS2, UGPS2
  • Close contact confirmation switch HPS, MHPS, UHPS

Flow rate sensor, Controller

  • Compact Flow Rate RAPIFLOW FSM3
  • Karman vortex flow rate sensor for Water FLUEREX WFK2
  • Miniature flow rate sensor RAPIFLOW FSM
  • Compact flow rate controller RAPIFLOW FCM
  • Flow sensor for compressed air (Display integrated FLUEREX flow sensor) PF-F, PFU
  • Flow sensor for compressed air (Display separated FLUEREX flow sensor) PFD
  • Flow rate sensor for water (FLUEREX flow sensor) WFK
  • Flow sensor for compressed air Tester kit PFK
  • Capacitance electromagnetic flow sensor WFC
  • Small size flow rate sensor RAPIFLOW FSM2

Main line unit

  • Refrigerated air dryer (Xeroaqua) GX3200D, GX5200D
  • Large model refrigerated air dryer (Xeroaqua) GT9000
  • Compact model desiccant dryer (Heatless dryer) HD
  • Manual desiccant air dryer 4001, 4002
  • High polymer membrane air dryer (Super dryer) SU, SD, SDM
  • Drain sensor DBS1006
  • System configuration
  • Desiccant air dryer (Heatless dryer) SHD
  • Medium main line filter AF2000
  • Drain discharger (Heavy duty drain) 5100
  • Drain discharger (Automatic drain) DB1000, DB3000
  • Drain discharger (Automatic drain) DT3000, DT4000
  • Medium main line filter (Oil-free) AF4000
  • Large main line filter (Regular) AF3000
  • Large main line filter (Oil-free) AF5000

Speed controller, Needle valve

  • with adjusting dial DSC
  • Needle valve with adjusting dial DVL
  • Elbow / with push-in fitting SC3W
  • Universal / with push-in fitting SC3U
  • Line type / with push-in fitting SCL2
  • Elbow/push-in fitting SC3R
  • Large bore size SC
  • Miniature in / out type SCD-M3, SC-M5
  • Medium bore size SC1
  • Miniature SC-M3, SC-M5
  • Stainless steel anti-corrosion SC3P

Total air systems

  • Large mechanical valve MAVL
  • Gamma system
  • Compact mechanical valve MS
  • Medium mechanical valve MM
  • Circuit device (Logic valve) RTD, PE, AL, SAL

Filter

  • Antibacterial, bacteria-removing filter SFC, SFS
  • Air filter F*000
  • Air filter flame-resistant series F*000-G4
  • Air filter medium pressure series FM*000
  • Oil mist filter M*000
  • Oil mist filter medium pressure series MM*000
  • High-performance oil mist filter MX*000
  • Compact air filter A1019
  • Large bore size air filter 1219
  • Vacuum filter VFA
  • Clean exhaust filter FAC
  • Drain separator FX
  • Inline clean filter FCS
  • Inline filter FSL

Filter, regulator

  • Filter / regulator W**00
  • Filter / regulator flame-resistant series W**00-G4
  • Filter / regulator copper and PTFE-free W*000-P6
  • Reverse filter / regulator copper and PTFE-free W*100-P6
  • Compact filter / regulator WB500
  • Air filter / regulator integrated B7019

Regulator

  • Regulator R**00
  • Digital pressure sensor for regulator PPR
  • Precision regulator RP1000, RP2000
  • Precision regulator RPE
  • Regulator flame-resistant series R**00-G4
  • Regulator medium pressure series RM*000
  • Regulator oil-prohibited series RN*000
  • Regulator copper and PTFE-free R*000-P6
  • Reverse regulator copper and PTFE-free R*100-P6
  • Miniature regulator RA
  • Compact regulator RB500, MNRB500
  • Regulator for water WR
  • Compact piston regulator RA800
  • Vacuum regulator VRA2000
  • Dial air regulator 2302, 2303, 2304
  • Large bore size reverse regulator (Check valve integrated) 2415
  • Large bore size regulator 2215, 2216
  • Compact direct acting precision regulator RJB500, MNRJB500
  • Clean regulator 2619
  • Compact reverse regulator 2419
  • Compact relief valve B6061
  • Compact regulator B2019
  • Clean regulator RC2000

Lubricator

  • Lubricator L*000
  • Compact lubricator A3019
  • Large bore size lubricator 3003E, 3004E, 3005E

Air booster

  • Air booster ABP
  • Air tank AT

Silencer

  • Metal body SL
  • Small bore size / resin body SL, SLW
  • Miniature SLM
  • Metering valve with silencer SMW2
  • Metering valve with silencer FMS, SMW
  • Exhaust cleaner FA

Nozzle, Auxiliary valve

  • Air blow nozzle BN*
  • Quick valve 2QV, 3QV
  • Quick exhaust valve QEV2
  • Shuttle valve SHV2
  • Threshold sensor PWS
  • Check valve CHV2
  • Block valve FPV
  • Compact check valve with push-in fitting CHL
  • Quick exhaust valve with push-in fitting QEL

Pressure gauge, Display

  • Low-profile pressure gauge G401-W
  • Pressure gauge with safety mark G40D
  • Pressure gauge with limit marker G45D
  • General use pressure gauge G49D, G59D
  • Pressure gauge for panel mounting G53D
  • Pressure gauge with switch G52D
  • Miniature pressure gauge G29D, G39D
  • Vacuum pressure gauge with limit marker VG41D
  • Differential pressure gauge GA400
  • Moisture indicator 6119-2C
  • Pressure gauge copper and PTFE-free G49D-P6, G59D-P6

Fittings, Tubes

  • Miniature fitting F
  • Tightening fitting MJ, fitting JL
  • Tightening fitting stainless steel ZJ
  • Fitting GW
  • Fitting stainless steel ZW
  • Fitting (Mini fitting) GWJ
  • Fitting stainless steel ZSP
  • Rotary fitting RJF
  • Fiber tube, Dedicated fitting
  • Tube

Information

  • Introduction
  • Ending

General Purpose Valves

Sanitary system

  • Weir diaphragm valve SWD, MWD

Compact 2,3-port solenoid valve

  • Pilot operated 2-port solenoid valve for compressed air EXA
  • Compact direct acting 2,3-port solenoid valve HNB/HNG
  • Compact direct acting 2,3-port solenoid valve USB/USG
  • Compact pilot operated solenoid valve for water FWD

Dedicated fluid control direct acting 2,3-port solenoid valve(Special purpose valve)

  • For compressed air FAB, FAG
  • For dry air FGB, FGG
  • 2-port solenoid valve for medium vacuum FVB
  • For water FWB, FWG
  • For hot waiter FHB
  • For oil 2-port solenoid valve FLB

Multi-fluid control 2,3-port solenoid valve(General purpose valve)

  • Direct acting 2-port solenoid valve AB
  • Direct acting 3-port solenoid valve AG
  • Pilot operated 2-port solenoid valve (piston drive) AP
  • Pilot kick 2-port solenoid valve (piston kick structure) APK
  • Pilot operated 2-port solenoid valve (diaphragm drive) AD
  • Pilot kick 2-port solenoid valve (diaphragm drive) ADK

2,3-port solenoid valve for dry air (General purpose valve)

  • Direct acting 2-port solenoid valve AB-Z
  • Direct acting 3-port solenoid valve AG-Z
  • Pilot kick 2-port solenoid valve ADK11-Z

Explosion proof multi-fluid control 2,3-port solenoid valve(General purpose valve)

  • Pressure and explosion proof constructing d2G4
  • Pressure and explosion proof constructing d2G2
  • Pressure and explosion proof constructing Exd2BT4
  • Pressure and explosion proof constructing Exd2BT2

Solenoid valve for high vacuum

  • Direct acting 2-port solenoid valve HVB
  • Delay vacuum solenoid valve HVL

Air operated 2-port valve (cylinder valve)

  • Air operated SAB
  • Type with solenoid valve SVB
  • compact air operated NAB
  • Diaphragm LAD
  • Diaphragm NAD

Related products for water

  • Y shaped strainer YS
  • Integrated unit for water control WXU
  • FLUEREX flow sensor for water WFK
  • Regulator for water WR
  • Capacitance electromagnetic flow sensor WFC

Air operated 2, 3-port ball valve (compact rotary valve)

  • Air operated 2-port valve CHB, CHBF, CHB-R, CHBF-R
  • Air operated 3-port valve CHG, CHG-R
  • Air operated 2-port valve ball valve with solenoid valve CHB-V, CHBF-V, CHB-X, CHBF-X
  • Air operated 3-port valve ball valve with solenoid valve CHG-V, CHG-X
  • Air operated 2-port valve for steam CSB, CSBF, CSB-R, CSBF-R

Motorized 2, 3-port ball valve

  • Standard MXB1(F), MXG1, MXB1D(F), MXG1D
  • Oil-prohibited specifications MXB1(D)-N, MXG1(D)-N
  • For steam MSB1(F), MSB1D(F)
  • Proportional control MXBC2, MXGC2
  • Miniature MHB4, MHG4

Other fluid control valve

  • Pilot kick 2-port solenoid valve for steam SPK
  • Direct pressure automatic pinch valve NPV2
  • Pilot kick 2-port solenoid valve for air PKA
  • Pilot kick 2-port solenoid valve for water PKW
  • Pilot operated 2-port solenoid valve PVS
  • Pilot operated 2-port solenoid valve KZV3
  • Manual pinch valve HPV
  • 3-port solenoid valve with spool position detection SNP
  • Cable ground
  • Pilot kick 2-port solenoid valve for steam PKS

Dust collection components(large port size dust collector valve)

  • Pilot operated 2-port valve PD2, PDV2, PD3, PDV3
  • Control box manifold solenoid valve PJVB
  • Explosion-proof 2-port solenoid valve PDVE4
  • Sequential fluid control components OMC2

Components for coolant

  • Check valve (for liquids) CCH
  • 2-port discrete valve CVE2, CVE22, CVSE2, CVSE22
  • 2-port modular coolant valve GCVE2, GCVSE2
  • 3-port discrete valve CV3E, CVS3E, CVE3, CVSE3
  • Pressure switch for coolant CPE, CPD

Components for Life Science

  • Metal free 2,3-port solenoid valve for chemical liquids MR16
  • Compact metal-free 2,3-port solenoid valve MR10
  • Metal free 2-port solenoid valve for chemical liquids MKB3
  • Metal free 2,3-port solenoid valve for chemical liquids MAB1, MAG1
  • Metal free 2,3-port solenoid valve for chemical liquids MYB, MYG
  • Metal free 2,3-port solenoid valve for chemical liquids MEB2, MEG2
  • Metal free 2-port solenoid valve for chemical liquids MJB3
  • Compact metal free lever type 2,3-port solenoid valve for chemical liquids HMTB1, HMTG1
  • Metal free 2-port solenoid valve for chemical liquids EMB
  • High corrosion resistant compact direct acting 2,3-port solenoid valve UMB1, UMG1
  • High corrosion resistant direct acting 2-port valve HB
  • Pinch valve HYN

Gas combustion systems

  • Intermediate pressure gas combination valve GHV
  • Gas cutoff valve (quick open) DSG
  • Medium pressure gas safety shut-off control system
  • Fluid operated 2-position cutoff valve HK1
  • Ball valve for automatic shutdown GASB
  • Low pressure gas combination valve GAV
  • Safety shut-off valve VNM-25-K
  • Gas cutoff valve (quick open) MN
  • Gas cutoff valve (quick open) VNA
  • Gas cutoff valve (slow open) VLA
  • Flow rate switching solenoid valve (quick open) VNA-R, VNA-RH
  • Fluid operated 2-position cutoff valve HS
  • Solenoid relief valve VNR

Automatic watering control systems

  • Resin solenoid valve for automatic watering GSV2
  • Wireless watering system RSC-W
  • Resin solenoid valve for automatic watering GSV
  • Solenoid valve for automatic watering RSV
  • Controller RSC,RSCH
  • Rain sensor RS-6

Custom order product

  • Noise reduced special purpose 2-port valve FGB31, FGB41, FWB31, FWB41
  • Frequent operation direct acting 2-port solenoid valve A2-5201, A2-5202
  • Ultra-low temperature 2-port solenoid valve A2-5800, A2-3400
  • Operated valve with solenoid valve for high pressure coolant
  • Air operated cylinder valve for high pressure air
  • Medium pressure cylinder valve NAB-6X2191, NAB-6X2192
  • Proportional solenoid valve A2-6500

Information

  • General purpose valve Intro
  • General purpose valve Ending

Mechanical index

Roller gear cam drive

  • Compact type RGIS, RGOS
  • Standard type RGIS, RGOS, RGCS
  • Wide angle type RGIL, RGOL
  • Table type RGIT, RGCT
  • Compact multi-index type RGIM, RGCM
  • Flat type RGID, RGCD
  • Basic type RGIB

Parallel cam drive

  • Standard type PCIS, PCOS

Pick and place drive

  • Circular type PPIM, PPIH, PPIX, PPOX
  • Linear type PPLX

Options

  • Worm reducer CRG, HO, TE
  • Torque saver TST, TSF
  • Torque guard TGX
  • Hollow shaft geared motor

Information

  • Precautions, Technical data, Selection guide

Electric index

Quick response type

  • AX1000/AX2000/AX4000

Mini type

  • AX6000M

High precision type

  • AX7000X

For Vacuum

Ejector system compatible

  • Vacuum burst function VSY
  • Discreate type VSH, VSU, VSB, VSC
  • 20 mm width dedicated single unit VSG
  • 16 mm width general VSK, VSKM
  • 20 mm width general VSJ, VSJM
  • 10.3mm width general VSN, VSNM
  • 10.5mm width general VSX, VSXM
  • 31.5 mm width dedicated single unit VSQ
  • 11 mm pitch manifold VSZM

Vacuum pump system compatible

  • 20 mm width general VSJP, VSJPM
  • 10.3mm width general VSNP, VSNPM
  • 10.5mm width general VSXP, VSXPM
  • 31.5 mm width dedicated single unit VSQP
  • 11 mm pitch manifold VSZPM

Suction pad

  • Suction pad VSP

Vacuum-related products

  • Position locking valve VSECV
  • Compact vacuum regulator VSRVV
  • Vacuum burst unit VSLF
  • Vacuum pressure switch VSUS
  • Air tweezers VST
  • Vacuum filter VSFB, VSFU, VSFJ

Information

  • Introduction, ending

For clean room

Pneumatic cylinders

  • Pencil shaped cylinder SCP*3
  • Round shaped cylinder SCM
  • Small direct mounting cylinder MDC2
  • Compact cylinder SMG
  • Compact cylinder SSD2
  • Guided cylinder STG
  • Guided cylinder STM
  • Linear slide cylinder LCR
  • Linear slide cylinder LCG
  • Linear slide cylinder LCX
  • Linear slide cylinder LCM
  • Twin rod cylinder STR2
  • Rodless cylinder with magnet MRL2
  • Table rotary actuator GRC

Pneumatic Valves

  • PLC-compatible block manifold MN3E・MN4E
  • Metal base 4GA1 to 3R, 4GB1 to 3R
  • Block manifold MN4GA, MN4GB

F.R. unit

  • Thin electro pneumatic regulator MEVT
  • Electro pneumatic regulator EV2100V
  • Clean regulator 2619
  • Clean regulator RC2000
  • Clean exhaust filter FAC
  • Filter / regulator W*000
  • Reverse filter / regulator W*100
  • Air filter F*000
  • Oil mist filter M*000
  • High-performance oil mist filter MX*000
  • Regulator R*000
  • Reverse regulator R*100
  • Related components
  • Inline clean filter FCS
  • Precision regulator RP*000
  • Pressure gauge G*9D
  • Differential pressure gauge GA400-8

Auxiliary components

  • Speed controller
  • Auxiliary valve
  • Fitting
  • Tube

Air unit

  • Clean air unit CAU30

Sensors

  • Compact electronic pressure switch (pressure switch) PPE
  • Compact electronic pressure switch (pressure switch) Analog output PPE-*A
  • Electronic pressure switch with digital display (pressure switch) PPD3
  • Miniature inline filter FSM-VFM
  • Small size flow rate sensor RAPIFLOW FSM2

Valve for air blow

  • 2-port solenoid valve for medium vacuum FVB
  • Pilot kick 2-port solenoid valve for dry air ADK-Z

Information

  • Introduction

For special fluids

Air operated valve

  • 2, 3-port valve AMD part 3R, GAMD part 3R
  • 2-port valve LMD
  • 2-port valve AMD
  • 3-port valve AMG
  • Manifold type GAMD
  • High pressure specifications 2, 3-port valve AMD, AMG, GAMD
  • 2-port valve AMD**

Manual valve

  • 2-port valve MMD
  • 2-port valve MMD*0
  • Manifold type GMMD
  • 2-port toggle valve TMD*02
  • Flow rate adjusting valve manual type FMD00

Drip prevention valve

  • Drip prevention valve AMS
  • Air operated valve drip prevention valve integrated type AMDS

Regulator

  • Pilot operated type PMP
  • Manual type PYM, PMM

Fine level switch

  • Fine level switch KML

Custom order product

  • Electric type flow rate adjusting valve MNV
  • Fine flow rate adjusting valve LYX
  • Large bore size chemical liquid valve LYX
  • Drainage valve (2-port valve) LYX
  • Drainage valve (3-port valve) LYX

Information

  • Introduction, ending

For high vacuum , special gas

Process gas component

  • Valve for process gas LGD
  • Air operated valve AGD
  • High durability and high temperature gas valve AGD
  • Manual valve (snap action) OGD
  • Manual valve (round handle) MGD
  • Vacuum generator VG
  • Regulator PGM

High vacuum component

  • Vacuum control system IAVB
  • Air operated valve AVB**7
  • Air operated valve AVB**3
  • Air operated valve AVB**2
  • Air operated valve AVB**2
  • Manual valve MVB*17
  • Manual valve MVB*0
  • Manual valve MVP*0
  • Electrical vacuum valve EVB
  • Solenoid valve for high vacuum HVB*
  • Delay vacuum solenoid valve HVL*2

Integrated gas supply system

  • Integrated gas supply system IAGD3
  • Integrated gas supply system IAGD4
  • Integrated gas supply system IAGD5
  • Clean panel FICS

Information

  • Introduction

Linear electric actuator

Motor integrated type

  • Electric Actuator KBX, KBZ
  • Electric Actuator ERL2, ESD2
  • Electric Actuator ESSD, ELCR

Motorless type

  • Electric shuttle mover ESM
  • Electric Actuator ETS
  • Electric Actuator ETV
  • Electric Actuator ECS
  • Electric Actuator ECV

Alphabetic Order

0~9 A B C D E
F G H I J K L
M N O P Q R S
T U V W X Y Z

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  • For high vacuum , special gas

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Process gas component

High vacuum component

Integrated gas supply system

Information

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